JPH0561578B2 - - Google Patents

Info

Publication number
JPH0561578B2
JPH0561578B2 JP57115429A JP11542982A JPH0561578B2 JP H0561578 B2 JPH0561578 B2 JP H0561578B2 JP 57115429 A JP57115429 A JP 57115429A JP 11542982 A JP11542982 A JP 11542982A JP H0561578 B2 JPH0561578 B2 JP H0561578B2
Authority
JP
Japan
Prior art keywords
pattern
chip
memory
defect inspection
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57115429A
Other languages
English (en)
Japanese (ja)
Other versions
JPS596536A (ja
Inventor
Yoshikazu Tanabe
Yoshihiko Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57115429A priority Critical patent/JPS596536A/ja
Publication of JPS596536A publication Critical patent/JPS596536A/ja
Publication of JPH0561578B2 publication Critical patent/JPH0561578B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP57115429A 1982-07-05 1982-07-05 欠陥検査装置 Granted JPS596536A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57115429A JPS596536A (ja) 1982-07-05 1982-07-05 欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57115429A JPS596536A (ja) 1982-07-05 1982-07-05 欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS596536A JPS596536A (ja) 1984-01-13
JPH0561578B2 true JPH0561578B2 (en]) 1993-09-06

Family

ID=14662344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57115429A Granted JPS596536A (ja) 1982-07-05 1982-07-05 欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS596536A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2716896B2 (ja) * 1991-11-05 1998-02-18 株式会社イトーキクレビオ 物品の保管・搬送システム
JP2531404B2 (ja) * 1992-01-29 1996-09-04 村田機械株式会社 ピッキングシステム
EP2624478B1 (en) 2010-09-30 2022-07-20 Panasonic Holdings Corporation Radio communication device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480087A (en) * 1977-12-09 1979-06-26 Hitachi Ltd External appearance test unit
JPS54111774A (en) * 1978-02-22 1979-09-01 Hitachi Ltd Inspection method of mask and its unit
JPS57207335A (en) * 1981-06-15 1982-12-20 Fujitsu Ltd Pattern checking system

Also Published As

Publication number Publication date
JPS596536A (ja) 1984-01-13

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